Patent Assignment
Reel/Frame 019325/0463
Assignment of Assignor's Interest
Recorded: 2007-05-21
Pages: 7
Assignors
SCHUSTER, KARL-HEINZ
Executed: 2007-04-25
HARTMAIER, JUERGEN
Executed: 2007-04-18
MAUL, MANFRED
Executed: 2007-04-24
SCHMEREK, DIETER
Executed: 2007-04-23
MUELLER, DETLEV
Executed: 2007-05-02
HAHNEMANN, OTTO
Executed: 2007-05-02
MARIANEK, FRANK
Executed: 2007-04-20
WEISS, GUNDULA
Executed: 2007-05-10
FIOLKA, DAMIAN
Executed: 2007-04-26
Assignee
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, 73447 OBERKOCHEN, GERMANY
Covered Property
(1)
Optical System of an Illumination Device of a Projection Exposure Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.