Patent Assignment
Reel/Frame 019327/0358
Assignment of Assignor's Interest
Recorded: 2007-05-14
Pages: 2
Assignors
HATAKEYAMA, JUN
Executed: 2007-03-20
HARADA, YUJI
Executed: 2007-03-20
WATANABE, TAKERU
Executed: 2007-03-20
Assignee
SHIN-ETSU CHEMICAL CO., LTD.
6-1, OHTEMACHI 2-CHOME, CHIYODA-KU, TOKYO 100-0004, JAPAN
Covered Property
(1)
Resist Protective Film Composition and Patterning Process