Patent Assignment
Reel/Frame 019328/0515
Assignment of Assignor's Interest
Recorded: 2007-05-22
Pages: 11
Assignors
MATYUSHKIN, ALEXANDER
Executed: 2007-05-04
KOOSAU, DENNIS
Executed: 2007-05-10
PANAGOPOULOS, THEODOROS
Executed: 2007-05-11
HOLLAND, JOHN
Executed: 1999-02-01
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Substrate Support with Electrostatic Chuck Having Dual Temperature Zones