Patent Assignment
Reel/Frame 019346/0556
Assignment of Assignor's Interest
Recorded: 2007-05-21
Pages: 2
Assignor
HOWALD, ARTHUR M.
Executed: 2007-05-16
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Method of Determining the Correct Average Bias Compensation Voltage During a Plasma Process