Patent Assignment
Reel/Frame 019350/0211
Assignment of Assignor's Interest
Recorded: 2007-05-25
Pages: 3
Assignee
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, 73447 OBERKOCHEN, GERMANY
Covered Property
(1)
Projection Objective and Projection Exposure Apparatus with Negative Back Focus of the Entry Pupil
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.