Patent Assignment
Reel/Frame 019350/0656
Assignment of Assignor's Interest
Recorded: 2007-05-29
Pages: 3
Assignee
NUFLARE TECHNOLOGY, INC.
2068-3, OOKA, NUMAZU-SHI, SHIZUOKA, 410-8510, JAPAN
Covered Property
(1)
Charged-Particle Beam Lithography with Grid Matching for Correction of Beam Shot Position Deviation