Patent Assignment
Reel/Frame 019358/0251
Assignment of Assignor's Interest
Recorded: 2007-05-29
Pages: 3
Assignors
POH, KIAN-SOONG
Executed: 2007-05-25
TANG, JUI-LING
Executed: 2007-05-25
LEE, CHONG-TAT
Executed: 2007-05-25
LIM, CHENG-CHUNG
Executed: 2007-05-25
Assignee
UNITED MICROELECTRONICS CORP.
NO. 3, LI-HSIN RD., II, SCIENCE-BASED INDUSTRIAL PARK, HSINCHU, R.O.C., TAIWAN
Covered Property
(1)
Method of Cleaning Turbo Pump and Chamber/Turbo Pump Clean Process