Patent Assignment
Reel/Frame 019367/0218
Assignment of Assignor's Interest
Recorded: 2007-05-10
Pages: 3
Assignors
HATAKEYAMA, JUN
Executed: 2007-04-13
FUJII, TOSHIHIKO
Executed: 2007-04-13
WATANABE, TAKERU
Executed: 2007-04-13
KOBAYASHI, KATSUHIRO
Executed: 2007-04-13
Assignee
SHIN-ETSU CHEMICAL CO., LTD.
6-1, OTEMACHI 2-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Photoresist Undercoat-Forming Material and Patterning Process