Patent Assignment
Reel/Frame 019374/0066
Assignment of Assignor's Interest
Recorded: 2007-05-09
Pages: 3
Assignors
OHSAWA, YOUICHI
Executed: 2007-04-06
WATANABE, TAKERU
Executed: 2007-04-06
HATAKEYAMA, JUN
Executed: 2007-04-06
Assignee
SHIN-ETSU CHEMICAL CO., LTD.
6-1, OTEMACHI 2-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Thermal Acid Generator, Resist Undercoat Material and Patterning Process