Patent Assignment
Reel/Frame 019376/0671
Assignment of Assignor's Interest
Recorded: 2007-06-04
Pages: 2
Assignor
TAKAHASHI, HIROYUKI
Executed: 2007-04-04
Assignee
TOKYO ELECTRON LIMITED
3-6 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-8481, JAPAN
Covered Property
(1)
Method and System for Dry Etching a Metal Nitride