Patent Assignment
Reel/Frame 019381/0534
Assignment of Assignor's Interest
Recorded: 2007-06-05
Pages: 7
Assignee
VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.
35 DORY ROAD, GLOUCESTER, MASSACHUSETTS, 01930
Covered Property
(1)
Techniques for Ion Beam Current Measurement Using a Scanning Beam Current Transformer