Patent Assignment
Reel/Frame 019383/0331
Assignment of Assignor's Interest
Recorded: 2007-05-29
Pages: 4
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Temperature Regulating Method, Thermal Processing System and Semiconductor Device Manufacturing Method
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.