Patent Assignment
Reel/Frame 019405/0653
Assignment of Assignor's Interest
Recorded: 2007-06-11
Pages: 3
Assignor
DE GROOT, PETER J.
Executed: 2003-09-30
Assignee
ZYGO CORPORATION
21 LAUREL BROOK ROAD, MIDDLEFIELD, CONNECTICUT, 06455-0448
Covered Property
(1)
Interferometry Method for Ellipsometry, Reflectometry, and Scatterometry Measurements, Including Characterization of Thin Film Structures