Patent Assignment
Reel/Frame 019409/0742
Assignment of Assignor's Interest
Recorded: 2007-05-24
Pages: 3
Assignors
CHO, SANGJUN
Executed: 2007-05-17
CHOI, TOM
Executed: 2007-05-15
HAN, TAEJOON
Executed: 2007-05-17
KANG, SEAN
Executed: 2007-05-17
GOPALADASU, PRABHAKARA
Executed: 2007-05-17
YEN, BI-MING
Executed: 2007-05-18
Assignee
LAM RESERACH CORPORATON
4650 CUSHING PARKWAY, FREEMONT, CALIFORNIA, 94538
Covered Property
(1)
In-Situ Photoresist Strip During Plasma Etching of Active Hard Mask