Patent Assignment
Reel/Frame 019416/0196
Assignment of Assignor's Interest
Recorded: 2007-05-23
Pages: 2
Assignors
KUTHI, ANDRAS
Executed: 2007-05-22
HWANG, STEPHEN
Executed: 2007-05-18
VETTER, JAMES C.
Executed: 2007-05-18
EILENSTINE, GREG
Executed: 2007-05-18
WANG, RONGPING
Executed: 2007-05-18
NGO, TUAN
Executed: 2007-05-18
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Methods of and Apparatus for Measuring and Controlling Wafer Potential in Pulsed Rf Bias Processing