Patent Assignment
Reel/Frame 019435/0105
Assignment of Assignor's Interest
Recorded: 2007-06-01
Pages: 3
Assignors
OHSAWA, YOUICHI
Executed: 2007-05-09
TAKEMURA, KATSUYA
Executed: 2007-05-09
SEKI, AKIHIRO
Executed: 2007-05-09
Assignee
SHIN-ETSU CHEMICAL CO., LTD.
6-1, OTEMACHI 2-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Photoacid Generators, Chemically Amplified Resist Compositions, and Patterning Process