Patent Assignment
Reel/Frame 019439/0122
Assignment of Assignor's Interest
Recorded: 2007-06-11
Pages: 3
Assignors
OUCHI, CHIDANE
Executed: 2007-05-11
NAKAUCHI, AKIHIRO
Executed: 2007-05-11
KATO, SEIMA
Executed: 2007-05-11
Assignee
CANON KABUSHIKI KAISHA
3-30-2, SHIMOMARUKO, OHTA-KU, TOKYO, JAPAN
Covered Property
(1)
Measuring Apparatus, Exposure Apparatus and Method, and Device Manufacturing Method