Patent Assignment
Reel/Frame 019444/0808
Assignment of Assignor's Interest
Recorded: 2007-06-18
Pages: 4
Assignors
CHEN, LI-JUN
Executed: 2007-05-30
GAU, TSAI-SHENG
Executed: 2007-05-30
PENG, CHI-KANG
Executed: 2007-06-01
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO. 8, LI-HSIN ROAD 6, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
In-Line Particle Detection for Immersion Lithography