Patent Assignment
Reel/Frame 019451/0475
Assignment of Assignor's Interest
Recorded: 2007-06-18
Pages: 4
Assignor
SHIBAZAKI, YUICHI
Executed: 2007-04-11
Assignee
NIKON CORPORATION
2-3, MARUNOUCHI 3-CHOME, CHIYODA-KU, TOKYO 100-8331, JAPAN
Covered Property
(1)
Movable Body Drive Method, Movable Body Drive System, Pattern Formation Method, Pattern Forming Apparatus, Exposure Method, Exposure Apparatus, and Device Manufacturing Method