Patent Assignment
Reel/Frame 019469/0418
Assignment of Assignor's Interest
Recorded: 2007-06-22
Pages: 3
Assignor
MOON, EUCLID E.
Executed: 2007-06-22
Assignee
MASSACHUSETTS INSTITUTE OF TECHNOLOGY
77 MASSACHUSETTS AVENUE, CAMBRIDGE, MASSACHUSETTS, 02139
Covered Property
(1)
Infrared Interferometric-Spatial-Phase Imaging Using Backside Wafer Marks