Assignment of Assignor's Interest

Recorded: 2007-06-25 Pages: 5

Assignors

KWAN, YIM-BUN PATRICK

Executed: 2007-06-01

HOLDERER, HUBERT

Executed: 2007-06-05

DEYHLE, JOHNANNES

Executed: 2007-05-25

EKSTEIN, CLAUDIA

Executed: 2007-03-05

Assignee

CARL ZEISS SMT AG

RUDOLF-EBER-STR. 2, 73447 OBERKOCHEN, GERMANY

Covered Property (1)

Support structure for temporarily supporting a substrate

Application: 11/728,799 →

Publication: US 2007/0285647

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.