Patent Assignment
Reel/Frame 019530/0970
Assignment of Assignor's Interest
Recorded: 2007-07-09
Pages: 3
Assignor
OSADA, SHIN
Executed: 2007-06-21
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-8481, JAPAN
Covered Property
(1)
Data Collection Method, Substrate Processing Apparatus, and Substrate Processing System