Data collection method, substrate processing apparatus, and substrate processing system
When measurement data collected with a specific sampling cycle by MCs from measuring instrument units are stored into a data storage apparatus, a sampling controller adjusts the sampling cycle to a longer setting if the apparatus state is other than a substrate processing execution state (e.g., an idling state) compared to the sampling cycle set in the substrate processing execution state, so as to minimize the volume of data stored into the data storage apparatus.
1. A data collection method to be adopted in a substrate processing apparatus that includes a processing chamber where a specific type of processing is executed on a processing target substrate such that the method collects data provided by a plurality of measuring instruments disposed, at least, in said processing chamber, the method comprising:
a step in which measurement data are obtained from said measuring instruments with a predetermined sampling cycle and are stored into a data storage means,
wherein said sampling cycle is adjusted based upon the state of said substrate processing apparatus,
wherein a decision is made as to whether or not said substrate processing apparatus is in a substrate processing execution state,
wherein if the state assumed by said substrate processing apparatus is judged not to be said substrate processing execution state, said sampling cycle is lengthened by the sampling control means relative to said sampling cycle set in said substrate processing execution state, and
wherein when said substrate processing apparatus is judged by the sampling control means not to be in said substrate processing execution state, a sampling cycle, which is at least equal to or shorter than said sampling cycle set in said substrate processing execution state, is selected if said substrate processing apparatus is in an apparatus startup state.
2. A data collection method to be adopted in a substrate processing apparatus that includes a processing chamber where a specific type of processing is executed on a processing target substrate and collects data provided by a plurality of measuring instruments disposed, at least, in said processing chamber, comprising:
a step in which measurement data are obtained from said measuring instruments with a predetermined sampling cycle and are stored into a data storage means,
wherein said measurement data stored in said data storage means are analyzed, the state of said substrate processing apparatus is estimated based upon the analysis results and said sampling cycle is adjusted based upon the estimate results,
wherein said measurement data stored in said data storage means are analyzed to estimate the extent of wear of a part disposed within said processing chamber based upon the analysis results, and a decision is made as to whether or not the estimated wear extent exceeds a predetermined threshold value, and if the wear extent is determined to exceed said threshold value, said sampling cycle is shortened relative to said sampling cycle set when the wear extent does not exceed said threshold value.
3. A substrate processing apparatus that includes a processing chamber where a specific type of processing is executed on a processing target substrate, comprising:
a plurality of measuring instruments disposed, at least, in said processing chamber;
a sampling means for obtaining measurement data from said measuring instruments with a predetermined sampling cycle;
a data storage means for storing said measurement data;
a sampling cycle storage means for storing in advance sampling cycles each corresponding to one of various states assumed by said substrate processing apparatus; and
a sampling control means for executing control whereby said sampling cycle is adjusted to a sampling cycle obtained from said sampling cycle storage means based upon the state currently assumed by said substrate processing apparatus,
wherein the sampling control means makes a decision as to whether or not said substrate processing apparatus is in a substrate processing execution state; and
if the state assumed by said substrate processing apparatus is judged not to be said substrate processing execution state, said sampling cycle is lengthened relative to said sampling cycle set in said substrate processing execution state, and
wherein when said substrate processing apparatus is judged not to be in said substrate processing execution state, a sampling cycle, which is at least equal to or shorter than said sampling cycle set in said substrate processing execution state, is selected if said substrate processing apparatus is in an apparatus startup state.
4. A substrate processing apparatus that includes a processing chamber where a specific type of processing is executed on a processing target substrate, comprising:
a plurality of measuring instruments disposed, at least, in said processing chamber;
a sampling means for obtaining measurement data from said measuring instruments with a predetermined sampling cycle;
a data storage means for storing said measurement data;
a data analysis means for analyzing said measurement data stored in said data storage means; and
a sampling control means for executing control so as to adjust said sampling cycle based upon the analysis results provided by said data analysis means,
wherein the data analysis means for analyzing said measurement data stored in the data storage means analyzes said stored data to estimate the extent of wear of a part disposed within said processing chamber based upon the analysis results and a decision is made as to whether or not the estimated wear extent exceeds a predetermined threshold value, and if the wear extent is determined to exceed said threshold value, said sampling cycle is shortened relative to said sampling cycle set when the wear extent does not exceed said threshold value.