Patent Assignment
Reel/Frame 019534/0393
Assignment of Assignor's Interest
Recorded: 2007-07-10
Pages: 3
Assignor
HIROKI, TSUTOMU
Executed: 2006-08-28
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-8481, JAPAN
Covered Property
(1)
Equipment and Method for Processing Semiconductor