Patent Assignment
Reel/Frame 019534/0633
Assignment of Assignor's Interest
Recorded: 2007-07-10
Pages: 3
Assignor
MACHIYAMA, WATARU
Executed: 2006-08-08
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-8481, JAPAN
Covered Property
(1)
Method for Detecting Transfer Shift of Transfer Mechanism and Semiconductor Processing Equipment