Patent Assignment
Reel/Frame 019546/0228
Assignment of Assignor's Interest
Recorded: 2007-07-10
Pages: 6
Assignors
SHAFER, DAVID R.
Executed: 2006-03-27
BEDER, SUSANNE
Executed: 2006-02-24
SCHUSTER, KARL-HEINZ
Executed: 2006-03-07
SINGER, WOLFGANG
Executed: 2006-10-06
Assignee
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, 73447 OBERKOCHEN, GERMANY
Covered Property
(1)
Objectives as a Microlithography Projection Objective with at Least One Liquid Lens
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.