Patent Assignment
Reel/Frame 019561/0363
Assignment of Assignor's Interest
Recorded: 2007-07-16
Pages: 8
Assignors
ENGLAND, JONATHAN GERALD
Executed: 2007-06-24
MUKA, RICHARD STEPHEN
Executed: 2007-06-28
HOLDEN, SCOTT C.
Executed: 2007-07-02
Assignee
VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.
35 DORY ROAD, GLOUCESTER, MICHIGAN, 01930
Covered Property
(1)
Techniques for Temperature-Controlled Ion Implantation