Patent Assignment
Reel/Frame 019576/0411
Assignment of Assignor's Interest
Recorded: 2007-07-18
Pages: 2
Assignor
OKITA, SHINICHI
Executed: 2007-06-29
Assignee
NIKON CORPORATION
2-3, MARUNOUCHI 3-CHOME, CHIYODA-KU, TOKYO, 100-8331, JAPAN
Covered Property
(1)
Alignment Condition Determination Method and Apparatus of the Same, and Exposure Method and Apparatus of the Same