Patent Assignment
Reel/Frame 019578/0923
Assignment of Assignor's Interest
Recorded: 2007-07-10
Pages: 5
Assignors
DEN BOEF, ARIE JEFFREY
Executed: 2007-06-21
CRAMER, HUGO AUGUSTINUS JOSEPH
Executed: 2007-07-02
DUSA, MIRCEA
Executed: 2007-06-25
SETIJA, IRWAN DANI
Executed: 2007-06-21
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, NL-5504 DR, VELDHOVEN, NETHERLANDS
Covered Property
(1)
Inspection Method and Apparatus, Lithographic Apparatus, Lithographic Processing Cell and Device Manufacturing Method