Patent Assignment
Reel/Frame 019586/0783
Assignment of Assignor's Interest
Recorded: 2007-07-23
Pages: 3
Assignor
ASAKURA, KENTARO
Executed: 2005-10-11
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-8481, JAPAN
Covered Property
(1)
Apparatus for Performing Semiconductor Processing on Target Substrate