Patent Assignment
Reel/Frame 019618/0956
Assignment of Assignor's Interest
Recorded: 2007-07-27
Pages: 5
Assignors
TALLAVARJULA, SAIRAJU
Executed: 2007-07-13
HUNTER, AARON M.
Executed: 2007-07-18
RANISH, JOSEPH M.
Executed: 2007-07-23
SWENBERG, JOHANES
Executed: 2007-07-15
HANEY, ROBERT M.
Executed: 2007-07-13
Assignee
APPLIED MATERIALS, INC.
P.O. BOX 450-A, LEGAL AFFAIRS DEPARTMENT, SANTA CLARA, CALIFORNIA, 95052
Covered Property
(1)
Methods for Plasma Matching Between Different Chambers and Plasma Stability Monitoring and Control