Patent Assignment
Reel/Frame 019631/0995
Assignment of Assignor's Interest
Recorded: 2007-07-19
Pages: 3
Assignor
HIROKI, TSUTOMU
Executed: 2007-07-06
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO-TO, JAPAN
Covered Property
(1)
Substrate Processing Apparatus, Substrate Processing Method, Computer Program, and Storage Medium