Patent Assignment
Reel/Frame 019644/0650
Assignment of Assignor's Interest
Recorded: 2007-07-24
Pages: 2
Assignors
DEN BOEF, ARIE JEFFREY
Executed: 2007-06-01
VAN DER MAST, KAREL DIEDERICK
Executed: 2007-06-01
VAN DER SCHAAR, MAURITS
Executed: 2007-06-18
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, NL-5504 DR, VELDHOVEN, NETHERLANDS
Covered Property
(1)
Method of Measuring Asymmetry in a Scatterometer, a Method of Measuring an Overlay Error in a Substrate and a Metrology Apparatus