Patent Assignment
Reel/Frame 019644/0660
Assignment of Assignor's Interest
Recorded: 2007-07-24
Pages: 5
Assignors
KLAASSEN, MICHEL FRANSOIS
Executed: 2007-05-25
VAN GREEVENBROEK, HENDRIKUS ROBERTUS MARIE
Executed: 2007-05-25
GEH, BERND
Executed: 2007-04-12
SCHMITT-WEAVER, EMIL PETER
Executed: 2007-04-20
Assignees
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, 73447 OBERKOCHEN, GERMANY
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, NL-5504 DR, NETHERLANDS
Covered Property
(1)
Illuminator for a Lithographic Apparatus and Method
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.