Patent Assignment
Reel/Frame 019661/0250
Assignment of Assignor's Interest
Recorded: 2007-08-07
Pages: 2
Assignor
KOHL, ALEXANDER
Executed: 2007-01-30
Assignee
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, 73447 OBERKOCHEN, GERMANY
Covered Property
(1)
Microlithographic Projection Exposure Apparatus Illumination Optics
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.