Patent Assignment
Reel/Frame 019669/0748
Assignment of Assignor's Interest
Recorded: 2007-06-25
Pages: 2
Assignor
FIOLKA, DAMIAN
Executed: 2006-11-24
Assignee
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, 73447 OBERKOCHEN, GERMANY
Covered Property
(1)
Illumination System for a Microlithography Projection Exposure Installation
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.