Patent Assignment
Reel/Frame 019673/0084
Assignment of Assignor's Interest
Recorded: 2007-08-02
Pages: 3
Assignee
AXCELIS TECHNOLOGIES, INC.
108 CHERRY HILL DRIVE, BEVERLY, MASSACHUSETTS, 01915-1053
Covered Property
(1)
Method of Reducing Transient Wafer Temperature During Implantation
Application:
11/829,243 →
Publication:
US 2008/0023654
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.