Patent Assignment
Reel/Frame 019685/0755
Assignment of Assignor's Interest
Recorded: 2007-08-13
Pages: 4
Assignors
SUN, JENNIFER Y.
Executed: 2007-06-18
DUAN, REN-GUAN
Executed: 2007-06-15
YUAN, JIE
Executed: 2007-06-14
XU, LI
Executed: 2007-06-15
COLLINS, KENNETH S.
Executed: 2007-06-15
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Method and Apparatus Which Reduce the Erosion Rate of Surfaces Exposed to Halogen-Containing Plasmas