Patent Assignment
Reel/Frame 019689/0306
Assignment of Assignor's Interest
Recorded: 2007-08-03
Pages: 3
Assignors
OGIHARA, TSUTOMU
Executed: 2007-04-06
UEDA, TAKAFUMI
Executed: 2007-04-06
IWABUCHI, MOTOAKI
Executed: 2007-04-06
Assignee
SHIN-ETSU CHEMICAL CO., LTD.
6-1, OTEMACHI 2-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Silicon-Containing Film-Forming Composition, Silicon-Containing Film, Silicon-Containing Film-Bearing Substrate, and Patterning Method