Assignment of Assignor's Interest

Recorded: 2007-08-27 Pages: 2

Assignor

HAUTALA, JOHN J.

Executed: 2007-07-17

Assignee

TOKYO ELECTRON LIMITED

3-6 AKASAKA 5-CHOME, MINATO-KU, TBS BROADCAST CENTER, TOKYO, 107-8481, JAPAN

Covered Property (1)

Apparatus and Methods for Treating a Workpiece Using a Gas Cluster Ion Beam

Application: 11/830,346 →

Publication: US 2009/0032725

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.