Patent Assignment
Reel/Frame 020109/0299
Assignment of Assignor's Interest
Recorded: 2007-11-14
Pages: 5
Assignor
TOKYO ELECTRON LIMITED
Executed: 2007-10-15
Assignee
TEL EPION INC.
37 MANNING ROAD, BILLERICA, MASSACHUSETTS, 01821
Covered Properties
(7)
Apparatus and Methods for Systematic Non-Uniformity Correction Using a Gas Cluster Ion Beam
Methods and Processing Systems for Using a Gas Cluster Ion Beam to Offset Systematic Non-Uniformities in Workpieces Processed in a Process Tool
Method and System for Treating an Interior Surface of a Workpiece Using a Charged Particle Beam
Methods and Apparatus for Assigning a Beam Intensity Profile to a Gas Cluster Ion Beam Used to Process Workpieces
Apparatus and Methods for Treating a Workpiece Using a Gas Cluster Ion Beam
Application:
11/830,346 →
Publication:
US 2009/0032725
Method and System for Increasing Throughput During Location Specific Processing of a Plurality of Substrates
Methods for Modifying Features of a Workpiece Using a Gas Cluster Ion Beam
Related Assignments
(10)
Other recorded transfers of the patents in this record — the chain of ownership.
Assignment of Assignor's Interest
Mar 30, 2007
From: CALIENDO, STEVEN; HOFMEESTER, NICOLAUS
To: TOKYO ELECTRON LIMITED
Reel/Frame 019095/0191 →
Assignment of Assignor's Interest
Mar 30, 2007
From: CALIENDO, STEVEN; HOFFMEESTER, NICOLAUS
To: TOKYO ELECTRON LIMITED
Reel/Frame 019095/0301 →
Assignment of Assignor's Interest
Jun 28, 2007
From: HOFMEESTER, NICOLAUS J.; CALIENDO, STEVEN P.; TETREAULT, THOMAS G.; MACCRIMMON, RUAIRIDH
To: TOKYO ELECTRON LIMITED
Reel/Frame 019495/0318 →
Assignment of Assignor's Interest
Aug 1, 2007
From: HOFMEESTER, NICOLAUS J.; CALIENDO, STEVEN P.
To: TOKYO ELECTRON LIMITED
Reel/Frame 019630/0186 →
Assignment of Assignor's Interest
Aug 13, 2007
From: SWENSON, DAVID RICHARD
To: TOKYO ELECTRON LIMITED
Reel/Frame 019683/0960 →
Assignment of Assignor's Interest
Aug 27, 2007
From: HAUTALA, JOHN J.
To: TOKYO ELECTRON LIMITED
Reel/Frame 019747/0532 →
Assignment of Assignor's Interest
Sep 6, 2007
From: WAGNER, REINHARD; SKINNER, WESLEY
To: TOKYO ELECTRON LIMITED
Reel/Frame 019787/0970 →
Confirmatory License
Dec 17, 2007
From: TEL EPION, INC.
To: ENERGY, UNITED STATES DEPARTMENT OF
Reel/Frame 020266/0636 →
Assignment of Assignor's Interest
Nov 29, 2011
From: CALIENDO, STEVEN P.; HOFMEESTER, NICOLAUS J.; MACCRIMMON, RUAIRIDH; HAUTALA, JOHN J.
To: TEL EPION INC.
Reel/Frame 027297/0260 →
Merger
Feb 7, 2020
From: TEL EPION INC.
To: TEL MANUFACTURING AND ENGINEERING OF AMERICA, INC.
Reel/Frame 051843/0245 →