Patent Assignment
Reel/Frame 019095/0301
Assignment of Assignor's Interest
Recorded: 2007-03-30
Pages: 2
Assignee
TOKYO ELECTRON LIMITED
3-6 AKASAKA 5-CHOME, MINATO-KU, TBS BROADCAST CENTER, TOKYO, 107-8481, JAPAN
Covered Property
(1)
Methods and Processing Systems for Using a Gas Cluster Ion Beam to Offset Systematic Non-Uniformities in Workpieces Processed in a Process Tool
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.