Patent Assignment
Reel/Frame 019630/0186
Assignment of Assignor's Interest
Recorded: 2007-08-01
Pages: 2
Assignee
TOKYO ELECTRON LIMITED
3-6 AKASAKA 5-CHOME, TBS BROADCAST CENTER, MINATO-KU, TOKYO, 107-8481, JAPAN
Covered Property
(1)
Method and System for Increasing Throughput During Location Specific Processing of a Plurality of Substrates
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.