Patent Assignment
Reel/Frame 019095/0191
Assignment of Assignor's Interest
Recorded: 2007-03-30
Pages: 2
Assignee
TOKYO ELECTRON LIMITED
3-6 AKASAKA 5-CHOME, MINATO-KU, TBS BROADCAST CENTER, TOKYO, 107-8481, JAPAN
Covered Property
(1)
Apparatus and Methods for Systematic Non-Uniformity Correction Using a Gas Cluster Ion Beam
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.