Patent Assignment
Reel/Frame 019495/0318
Assignment of Assignor's Interest
Recorded: 2007-06-28
Pages: 3
Assignors
HOFMEESTER, NICOLAUS J.
Executed: 2007-06-27
CALIENDO, STEVEN P.
Executed: 2007-06-27
TETREAULT, THOMAS G.
Executed: 2007-06-27
MACCRIMMON, RUAIRIDH
Executed: 2007-06-27
Assignee
TOKYO ELECTRON LIMITED
TBS BROADCAST CENTER, 3-6 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-8481, JAPAN
Covered Property
(1)
Methods and Apparatus for Assigning a Beam Intensity Profile to a Gas Cluster Ion Beam Used to Process Workpieces
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.