Methods and apparatus for assigning a beam intensity profile to a gas cluster ion beam used to process workpieces

1. A method for assigning a beam intensity profile to a gas cluster ion beam, the method comprising:

generating the gas cluster ion beam in a vacuum vessel of a gas cluster ion beam processing apparatus;

collecting parametric data relating to a spatial intensity of the gas cluster ion beam; and

generating the beam intensity profile by fitting a mathematical functional shape to the parametric data.

2. The method of claim 1 , wherein collecting the parametric data comprises:

etching a feature in a workpiece or in a film on the workpiece using the gas cluster ion beam; and

measuring the parametric data from a depth profile of the etched feature using a beam diagnostic system including an ex-situ metrology tool that is external to the vacuum vessel.

3. The method of claim 2 , wherein the workpiece is stationary when the feature is etched, and the etched feature comprises a circular etch feature in the workpiece or in the film on the workpiece.

4. The method of claim 2 , further comprising:

scanning the workpiece and the gas cluster ion beam relative to each other, when the feature is etched, such that the etched feature comprises a trench in the workpiece or in the film on the workpiece.

5. The method of claim 2 , wherein the ex-situ metrology tool comprises a spectroscopic ellipsometer, a frequency probe, or an interferometer.

6. The method of claim 1 , wherein collecting the parametric data comprises:

depositing a material on a workpiece using the gas cluster ion beam; and

measuring the parametric data from a topography of the deposited material using a beam diagnostic system including an ex-situ metrology tool that is external to the vacuum vessel.

7. The method of claim 6 , wherein the ex-situ metrology tool comprises a spectroscopic ellipsometer, a frequency probe, an interferometer, or a profilometer.

8. The method of claim 1 , wherein collecting the parametric data comprises:

exposing the gas cluster ion beam to a beam diagnostic system including a beam current analysis system that is at least partially internal to the vacuum vessel; and

measuring a beam current profile of the gas cluster ion beam using the beam diagnostic system to supply the beam intensity profile.

9. The method of claim 8 , wherein the beam current analysis system comprises a scanable aperture in front of a stationary Faraday cup.

10. The method of claim 1 , wherein the parametric data comprises a cross-sectional slice of the spatial intensity of the gas cluster ion beam, and the beam intensity profile is generated by rotating the mathematical functional shape around a propagation axis of the gas cluster ion beam.

11. The method of claim 1 , wherein the mathematical functional shape comprises one or more Gaussian or Laurentzian distribution functions.

12. A method for processing a first workpiece using a gas cluster ion beam, the method comprising:

generating the gas cluster ion beam in a vacuum vessel of a gas cluster ion beam processing apparatus;

assigning a beam intensity profile to the gas cluster ion beam by fitting a mathematical functional shape to parametric data relating to a spatial intensity of the gas cluster ion beam; and

scanning the gas cluster ion beam and the first workpiece relative to each other with a scanning pattern based at least in part on the beam intensity profile.

13. The method of claim 12 , wherein assigning the beam intensity profile comprises:

etching a feature in a second workpiece or in a film on the second workpiece using the gas cluster ion beam; and

collecting the parametric data from a depth profile of the etched feature using a beam diagnostic system containing an ex-situ metrology tool that is external to the vacuum vessel.

14. The method of claim 13 , wherein the second workpiece is stationary when the feature is etched, and the etched feature comprises a circular etch feature in the second workpiece or in the film on the second workpiece.

15. The method of claim 13 , wherein the second workpiece and the gas cluster ion beam are scanned relative to each other when the feature is etched, and the etched feature comprises a trench in the workpiece or in the film on the workpiece.

16. The method of claim 13 , wherein the ex-situ metrology tool comprises a spectroscopic ellipsometer, a frequency probe, or an interferometer.

17. The method of claim 12 , wherein assigning the beam intensity profile comprises:

depositing a material on a second workpiece using the gas cluster ion beam; and

collecting the parametric data from a topography of the deposited material on the second workpiece using a beam diagnostic system containing an ex-situ metrology tool that is external to the vacuum vessel.

18. The method of claim 17 , wherein the ex-situ metrology tool comprises a spectroscopic ellipsometer, a frequency probe, an interferometer, or a profilometer.

19. The method of claim 12 , wherein assigning the beam intensity profile comprises:

exposing the gas cluster ion beam to a beam diagnostic system containing a beam current analysis system comprising a scanable aperture in front of a stationary Faraday cup internal to the vacuum vessel; and

collecting the parametric data using the beam diagnostic system to assess the spatial intensity of the gas cluster ion beam.

20. The method of claim 12 , wherein the mathematical functional shape comprises one or more Gaussian or Laurentzian distribution functions.

21. A processing system, comprising:

a gas cluster ion beam processing apparatus configured for generating a gas cluster ion beam;

a beam diagnostic system configured to collect parametric data relating to a spatial intensity of the gas cluster ion beam; and

a controller coupled in communication with the gas cluster ion beam processing apparatus and the beam diagnostic system, the controller configured to receive the parametric data communicated from the beam diagnostic system, to generate a beam intensity profile describing the spatial intensity of the gas cluster ion beam by fitting a mathematical functional shape to the parametric data, to generate control signals for operation of the gas cluster ion beam processing apparatus that represent a scanning pattern across a workpiece determined from the beam intensity profile, and to communicate the control signals to the gas cluster ion beam processing apparatus,

wherein the scanning pattern is selected based at least in part on the beam intensity profile.

22. The processing system of claim 21 , wherein the gas cluster ion beam processing apparatus includes a vacuum vessel, a source configured to produce a gas cluster ion beam inside the vacuum vessel, and a workpiece support including an X-Y positioning table in the vacuum vessel.

23. The processing system of claim 21 , wherein the beam diagnostic system comprises a beam current analysis system or an ex-situ metrology tool including a spectroscopic ellipsometer, a frequency probe, an interferometer, or a profilometer.