Patent Assignment
Reel/Frame 019770/0412
Assignment of Assignor's Interest
Recorded: 2007-08-30
Pages: 5
Assignors
LIU, WEI
Executed: 2007-08-30
LI, SHIFANG
Executed: 2007-08-30
YANG, WEIDONG
Executed: 2007-08-30
Assignee
TOKYO ELECTRON LIMITED
3-6 AKASAKA 5-CHOME, MINATO-KU TOKYO, 107-8481, JAPAN
Covered Property
(1)
Determining Profile Parameters of a Structure Using Approximation and Fine Diffraction Models in Optical Metrology