Patent Assignment
Reel/Frame 019785/0982
Assignment of Assignor's Interest
Recorded: 2007-09-05
Pages: 3
Assignee
CARL ZEISS SMT AG
CARL-ZEISS-STRASSE 22, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Filter Device for the Compensation of an Asymmetric Pupil Illumination
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.