Patent Assignment
Reel/Frame 019799/0468
Assignment of Assignor's Interest
Recorded: 2007-09-07
Pages: 5
Assignors
LACKNER, GERALD
Executed: 2007-09-06
MAIER, CHRISTIAN
Executed: 2007-09-07
SANTOS RODRIGUEZ, FRANCISCO JAVIER
Executed: 2007-09-06
Assignee
INFINEON TECHNOLOGIES AG
AM CAMPEON 1-12, NEUBIBERG, 85579, GERMANY
Covered Property
(1)
Method, Apparatus for Holding and Treatment of a Substrate