Patent Assignment
Reel/Frame 019802/0022
Assignment of Assignor's Interest
Recorded: 2007-09-10
Pages: 3
Assignee
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Euv Illumination System
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.